薄膜蒸鍍
最低使用時間:2小時
Water Chiller KW-2KPTS
Pumping System MAIN:(TMP) TURBOVAC361
BACK:(SP) DIS-251
Vacuum Gauge System Turbo.Drive TD20 classic
Chamber
Thickness Control System CRTM-6000G
E-beam Source 電子束源:EGK-3M
電源供應器:HPS-510S
2700元/2小時
Water Chiller KW-2KPTS
Pumping System MAIN:(TMP) TURBOVAC361
BACK:(SP) DIS-251
Vacuum Gauge System Turbo.Drive TD20 classic
Chamber
Thickness Control System CRTM-6000G
E-beam Source 電子束源:EGK-3M
電源供應器:HPS-510S
張可耕
2018-06-13